M05000 - SEMI M50 - Test Method for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method Revision:SEMI M50-1116 - Superseded provided the delivered moisture concentration

provided the delivered moisture concentration is predictable on the basis of fundamental principles of physics

イオン注入装置

Vendor independence and openness are guaranteed by the CC-Link Partner Association

This Standard covers a definition and usage of extended recipe identification scheme which identifies recipes from multiple aspects including uniqueness and security

collection event

M05000 - SEMI M50 - Test Method for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method Revision:SEMI M50-1116 - Superseded provided the delivered moisture concentrationThis Test Method covers determination of the CR, the false count rate (FCR) and the cumulative false count rate (CFCR) of an SSIS as a function of the latex sphere equivalent (LSE) size of localized light scatterers (LLSs). This Test Method addresses calculating and reporting SSIS CR from measurements of either PSL depositions or other LLSs on wafers in LSE units. Two test methods are covered: Static Method In which the test is conducted under level 1